測定例：Si 2p
| name | unit | Si wafer | Si wafer |
| orbit | Si 2p | Si 2p | |
| source | Ga Kα | Ga Kα | |
| source energy | eV | 9251.74 | 9251.74 |
| pass energy | eV | 200 | 100 |
| start energy (kinetic) | eV | 9138 | 9144 |
| end energy (kinetic) | eV | 9154 | 9152 |
| start energy (binding) | eV | 110.04 | 104.04 |
| end energy (binding) | eV | 94.04 | 96.04 |
| energy step | eV | 0.1 | 0.05 |
| dwell / point | sec | 2 | 1 |
| number of sweep | 10 | 41 | |
| mode | sweep | sweep | |
| total measurement time | min | 112.7 | 231 |
| entrance slit | mm | 0.5 | 1.5 |
| lens mode | transmission | transmission | |
| energy offset (work function) | 3.7 | 3.7 | |
| data points | 161 | 161 | |
| take off angle | deg | 88 | 88 |
| neutralize | |||
| comment |